Measurement of 1 million micro-holes in just a few minutes

The Werth multi-sensor measurement concept is ideal for measurement of workpieces from the electronics, precision engineering and optics industries. One example is the measurement of glass perforated plates, which are manufactured in full sheets measuring approx. 600 mm × 600 mm with up to 1 million extremely small holes (Through Glass Vias, – TGV). The individual samples or patterns are subsequently separated, metallically plated through and used for so-called advanced packaging, i.e. the stacking of circuits in chip manufacturing. A 100% measurement of the position, diameter (≤ 100 µm), shape and orientation of the bores is required. In addition, the flatness and thickness of the glass plate must be determined. The metrological challenges lie in the structural resolution required to capture the bore diameters and shapes across a very large number of bores, for which a significantly higher measuring speed is required than with conventional image processing.

The Werth VideoCheck® HA is specifically designed for the measurement of precision workpieces with tolerances in the micrometre range. The patented Raster Scanning HD mode enables the automatic capture of large areas containing small geometric features with high accuracy, thereby uniquely meeting the requirements for resolution and measuring speed. This produces an overall image with a resolution of up to 75,000 megapixels. The position, diameter and shape of up to 1 million bores can be measured and evaluated in series in less than 15 minutes. This makes Raster Scanning HD many times faster than conventional measurement methods.
Werth probably offers the world’s largest selection of sensors, enabling complete measurements at previously unmatched speeds. The patented Werth Fiber Probe® is ideal for the measurement of form error at various heights within the bore and, with its glass stylus tip (diameter ≥ 20 µm), is regarded as the world’s most successful probe gauge. In addition, the Chromatic Focus Point Sensor is used for the measurement of the thickness and flatness of glass plates (glass thickness ≥ 200 µm). Distance is determined based on the colour of the reflected light, which enables measurements even on reflective and transparent surfaces during coating thickness measurements.

<script type="text/x-ccm-loader" data-ccm-loader-group="ccm-group-scripts">$("div.cookieconsent-optout-preferences").hide();if(jwplayer){jwplayer("werthplayer_video_6a323bfa0e1fa").setup({skin: "/fileadmin/template/werth/js/jwplayer/glow.xml",file: "/fileadmin/import/data/Bilder/videos/Werth_TGV_DE.mp4",image: "/fileadmin/import/data/Bilder/Werth_Logo.png",width: "100%",aspectratio: "16:9",autostart: "false"});}else{console.log("Error load jwplayer")}</script>